Patent Application
Provisional
App. No. 61/140,812
· Confirmation No. 5608
PATTERN SELECTION FOR LITHOGRAPHIC MODEL CALIBRATION
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2009-12-18 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2009-12-16 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2009-12-09 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 1 | View | |
| 2009-12-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-12-09 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2009-12-09 | PA.. |
Power of Attorney | 2 | View | |
| 2009-08-25 | PD.AUTH.NTC |
Notice that authorization for participating IP Offices to access US application was improper | 1 | View | |
| 2009-08-17 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 1 | View | |
| 2009-08-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-01-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2008-12-24 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2008-12-24 | SPEC |
Specification | 26 | View | |
| 2008-12-24 | CLM |
Claims | 4 | View | |
| 2008-12-24 | ABST |
Abstract | 1 | View | |
| 2008-12-24 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2008-12-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-12-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Yu Cao
Santa Clara, CA
Wenjin Shao
Santa Clara, CA
Jun Ye
Santa Clara, CA
Ronald Goossens
Santa Clara, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 909
- Docket No.
- 081468-0376045 (P-7304)
- Confirmation No.
- 5608
Child
PCT
Claims priority from a provisional application
→
PCT/US2009/063798
Filed 2009-11-10
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 13/128,630
· US 8,930,172
Filed 2011-05-10
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
Claims priority from a provisional application
→
App. 14/246,961
· US 9,672,301
Filed 2014-04-07
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/036,690
· US 10,846,442
Filed 2018-07-16
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/589,738
· US 10,025,885
Filed 2015-01-05
· Patented Case
Child
Claims priority from a provisional application
→
App. 12/613,244
· US 8,694,928
Filed 2009-11-05
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-04-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2009-12-09
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Quick Facts
- App. No.
- 61/140,812
- Filed
- 2008-12-24
External Links