Patent Application
Provisional
Small
App. No. 61/169,551
· Confirmation No. 1196
CYCLIC SELF-LIMITING CMP REMOVAL AND ASSOCIATED PROCESSING TOOL
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2010-12-17 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2010-12-07 | PET.DEC.OIPE |
Petition decision routed to the Office of Patent Application Processing(OPAP) to act on the decision or continue prosecution | 2 | View | |
| 2010-12-06 | WFEE |
Fee Worksheet (SB06) | 3 | View | |
| 2010-07-08 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-07-08 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2010-06-29 | PET.OP |
Petition for review by the Office of Petitions | 2 | View | |
| 2010-06-29 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2010-06-29 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2010-06-29 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2010-06-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-06-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-06-29 | PA.. |
Power of Attorney | 1 | View | |
| 2010-06-29 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 2 | View | |
| 2010-06-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-04-29 | NT.INCPL.APP |
Notice of Incomplete Application | 2 | View | |
| 2010-03-02 | PETDEC |
Petition Decision | 2 | View | |
| 2009-05-08 | PET.OP |
Petition for review by the Office of Petitions | 2 | View | |
| 2009-05-08 | LET. |
Miscellaneous Incoming Letter | 3 | View | |
| 2009-05-08 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-05-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-05-08 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2009-05-04 | NT.INCPL.APP |
Notice of Incomplete Application | 2 | View | |
| 2009-04-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2009-04-15 | SPEC |
Specification | 17 | View | |
| 2009-04-15 | CLM |
Claims | 4 | View | |
| 2009-04-15 | ABST |
Abstract | 1 | View | |
| 2009-04-15 | DRW |
Drawings-only black and white line drawings | 2 | View | |
| 2009-04-15 | ADS |
Application Data Sheet | 5 | View | |
| 2009-04-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-04-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 93341
- Docket No.
- SM90001P
- Confirmation No.
- 1196
Child
Claims priority from a provisional application
→
App. 12/761,110
· US 8,506,835
Filed 2010-04-15
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
Child
PCT
Claims priority from a provisional application
→
PCT/US2010/031246
Filed 2010-04-15
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-06-23
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Quick Facts
- App. No.
- 61/169,551
- Filed
- 2009-04-15
External Links