IP Library › Patent Application 61304574
Patent Application Provisional
App. No. 61/304,574 · Confirmation No. 9200

Method for chemical mechanical planarization of a tungsten-containing substrate

Provisional Application Expired
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 Code Description Pages PDF
2011-03-08 APP.FILE.REC Filing Receipt 3 View
2011-03-03 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2011-03-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-17 TRAN.LET Transmittal Letter 2 View
2010-03-17 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-03-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-03-10 APP.FILE.REC Filing Receipt 3 View
2010-02-15 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-02-15 SPEC Specification 28 View
2010-02-15 CLM Claims 2 View
2010-02-15 ABST Abstract 1 View
2010-02-15 WFEE Fee Worksheet (SB06) 2 View
2010-02-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/304,574
Filed
2010-02-15