IP Library › Patent Application 61386168
Patent Application Provisional
App. No. 61/386,168 · Confirmation No. 7304

Optische Anordnung in einer mikrolithographischen Projektionsbelichtungsanlage

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-08-31 TRAN.LET Transmittal Letter 2 View
2011-08-31 SPEC Specification 13 View
2011-08-31 CLM Claims 3 View
2011-08-31 ABST Abstract 1 View
2011-08-31 DRW Drawings-only black and white line drawings 5 View
2011-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-10-01 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2010-10-01 APP.FILE.REC Filing Receipt 3 View
2010-09-24 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 1 View
2010-09-24 SPECNO Specification - Not in English 22 View
2010-09-24 DRW Drawings-only black and white line drawings 5 View
2010-09-24 WFEE Fee Worksheet (SB06) 2 View
2010-09-24 N417 Electronic Filing System Acknowledgment Receipt 3 View
2010-09-24 TR.PROV Provisional Cover Sheet (SB16) 1 View
2010-09-24 ADS Application Data Sheet 5 View
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Quick Facts
App. No.
61/386,168
Filed
2010-09-24