IP Library › Patent Application 61406675
Patent Application Provisional
App. No. 61/406,675 · Confirmation No. 1155

Modulation device and charged particle multi-beamlet lithography system using the same

Provisional Application Expired
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 Code Description Pages PDF
2011-10-26 R48.REQ Request under Rule 48 correcting inventorship 2 View
2011-10-26 WFEE Fee Worksheet (SB06) 2 View
2011-10-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-11-22 APP.FILE.REC Filing Receipt 3 View
2010-10-26 TR.PROV Provisional Cover Sheet (SB16) 3 View
2010-10-26 DRW Drawings-only black and white line drawings 8 View
2010-10-26 SPEC Specification 19 View
2010-10-26 CLM Claims 6 View
2010-10-26 ABST Abstract 1 View
2010-10-26 WFEE Fee Worksheet (SB06) 2 View
2010-10-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/406,675
Filed
2010-10-26