IP Library › Patent Application 61414459
Patent Application Provisional
App. No. 61/414,459 · Confirmation No. 2752

METHOD FOR DETERMINING A DISTANCE BETWEEN TWO BEAMLETS IN A MULTI-BEAMLET EXPOSURE APPARATUS

Inventor: Jan Andries Meijer
Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2010-12-27 APP.FILE.REC Filing Receipt 3 View
2010-11-17 ADS Application Data Sheet 3 View
2010-11-17 SPEC Specification 18 View
2010-11-17 CLM Claims 4 View
2010-11-17 DRW Drawings-only black and white line drawings 5 View
2010-11-17 WFEE Fee Worksheet (SB06) 2 View
2010-11-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/414,459
Filed
2010-11-17