IP Library › Patent Application 61414775
Patent Application Provisional
App. No. 61/414,775 · Confirmation No. 4126

Data Path with Redundancy for lithography apparatus

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2010-12-17 APP.FILE.REC Filing Receipt 3 View
2010-11-17 SPEC Specification 24 View
2010-11-17 CLM Claims 2 View
2010-11-17 DRW Drawings-only black and white line drawings 11 View
2010-11-17 ADS Application Data Sheet 4 View
2010-11-17 WFEE Fee Worksheet (SB06) 2 View
2010-11-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/414,775
Filed
2010-11-17