IP Library › Patent Application 61444353
Patent Application Provisional
App. No. 61/444,353 · Confirmation No. 2957

Fluorine Based Chamber Clean With Nitrogen Trifluoride Backup

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-03-16 APP.FILE.REC Filing Receipt 3 View
2011-02-18 TR.PROV Provisional Cover Sheet (SB16) 3 View
2011-02-18 SPEC Specification 9 View
2011-02-18 CLM Claims 2 View
2011-02-18 ABST Abstract 1 View
2011-02-18 DRW Drawings-only black and white line drawings 2 View
2011-02-18 WFEE Fee Worksheet (SB06) 2 View
2011-02-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/444,353
Filed
2011-02-18