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App. No. 13/353,729 · Confirmation No. 2680

Fluorine Based Chamber Clean With Nitrogen Trifluoride Backup

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Quick Facts
App. No.
13/353,729
Filed
2012-01-19
Pub. No.
US20130017644A1
Art Unit
2822