IP Library › Patent Application 61488882
Patent Application Provisional
App. No. 61/488,882 · Confirmation No. 9184

METHOD FOR SPLITTING A PATTERN FOR USE IN A MULTI-BEAM LITHOGRAPHY APPARATUS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-06-28 APP.FILE.REC Filing Receipt 3 View
2011-05-23 ADS Application Data Sheet 5 View
2011-05-23 SPEC Specification 13 View
2011-05-23 CLM Claims 2 View
2011-05-23 DRW Drawings-only black and white line drawings 5 View
2011-05-23 WFEE Fee Worksheet (SB06) 2 View
2011-05-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/488,882
Filed
2011-05-23