Patent Application
Provisional
Small
App. No. 61/491,862
· Confirmation No. 2106
POSITION DETERMINATION IN A LITHOGRAPHY SYSTEM USING A SUBSTRATE HAVING A PARTIALLY REFLECTIVE POSITION MARK
Inventor:
Niels Vergeer
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-06-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2011-05-31 | TR.PROV |
Provisional Cover Sheet (SB16) | 1 | View | |
| 2011-05-31 | SPEC |
Specification | 23 | View | |
| 2011-05-31 | CLM |
Claims | 6 | View | |
| 2011-05-31 | ABST |
Abstract | 1 | View | |
| 2011-05-31 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2011-05-31 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-05-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Niels Vergeer
Rotterdam, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 3531P044Z
- Confirmation No.
- 2106
Child
Claims priority from a provisional application
→
App. 13/453,989
· US 9,201,315
Filed 2012-04-23
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/453,994
· US 9,395,636
Filed 2012-04-23
· Patented Case
Child
Claims priority from a provisional application
→
App. 13/453,986
· US 9,395,635
Filed 2012-04-23
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 61/491,862
- Filed
- 2011-05-31
External Links