Patent Application
Provisional
Small
App. No. 61/506,581
· Confirmation No. 2414
LITHOGRAPHY SYSTEM AND METHOD FOR STORING POSITIONAL DATA OF A TARGET
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-07-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2011-07-11 | TR.PROV |
Provisional Cover Sheet (SB16) | 2 | View | |
| 2011-07-11 | SPEC |
Specification | 19 | View | |
| 2011-07-11 | CLM |
Claims | 4 | View | |
| 2011-07-11 | ABST |
Abstract | 1 | View | |
| 2011-07-11 | DRW |
Drawings-only black and white line drawings | 4 | View | |
| 2011-07-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-07-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Alexius Otto Looije
Naaldwijk, NETHERLANDS
Michel Pieter Dansberg
Berkel en Rodenrijs, NETHERLANDS
Marcel Nicolaas Jacobus Van Kervinck
Den Haag, NETHERLANDS
Guido De Boer
Leerdam, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- 3531P049Z
- Confirmation No.
- 2414
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 61/506,581
- Filed
- 2011-07-11
External Links