IP Library › Patent Application 61533398
Patent Application Provisional Small
App. No. 61/533,398 · Confirmation No. 3108

Target positioning device and a lithography system comprising such a target positioning device

Provisional Application Expired
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 Code Description Pages PDF
2012-09-20 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-09-12 PA.. Power of Attorney 1 View
2012-09-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-09-28 APP.FILE.REC Filing Receipt 3 View
2011-09-12 TR.PROV Provisional Cover Sheet (SB16) 2 View
2011-09-12 SPEC Specification 7 View
2011-09-12 CLM Claims 3 View
2011-09-12 ABST Abstract 1 View
2011-09-12 DRW Drawings-only black and white line drawings 4 View
2011-09-12 WFEE Fee Worksheet (SB06) 2 View
2011-09-12 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/533,398
Filed
2011-09-12