Patent Application
Provisional
Small
App. No. 61/546,384
· Confirmation No. 5050
Apparatus and Process for Depositing a Thin Layer of Resist on a Substrate
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2011-10-25 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2011-10-12 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2011-10-12 | ADS |
Application Data Sheet | 5 | View | |
| 2011-10-12 | SPEC |
Specification | 10 | View | |
| 2011-10-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-10-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Guy M. Danner
Somerville, MA
Vladimir S. Tarasov
Somerville, MA
Peter G. Madden
Burlington, MA
Holly G. Gates
Somerville, MA
Emanuel M. Sachs
Newton, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 21403
- Docket No.
- 1366-0074PR
- Confirmation No.
- 5050
Child
PCT
Claims priority from a provisional application
→
PCT/US2012/059967
Filed 2012-10-12
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 14/349,087
· US 9,815,072
Filed 2014-04-02
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
from
MADDEN, PETER G,
TARASOV, VLADIMIR S,
DANNER, GUY M,
GATES, HOLLY G,
KANE, PETER E,
SACHS, EMANUEL M
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-03-17
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2011-11-22
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Quick Facts
- App. No.
- 61/546,384
- Filed
- 2011-10-12
External Links