IP Library › Patent Application 61552479
Patent Application Provisional
App. No. 61/552,479 · Confirmation No. 8685

DATA PATH FOR LITHOGRAPHY APPARATUS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2011-11-14 APP.FILE.REC Filing Receipt 3 View
2011-10-28 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2011-10-28 WFEE Fee Worksheet (SB06) 2 View
2011-10-28 N417 Electronic Filing System Acknowledgment Receipt 3 View
2011-10-28 ADS Application Data Sheet 5 View
2011-10-28 SPEC Specification 44 View
2011-10-28 CLM Claims 12 View
2011-10-28 ABST Abstract 1 View
2011-10-28 DRW Drawings-only black and white line drawings 19 View
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Quick Facts
App. No.
61/552,479
Filed
2011-10-28