IP Library › Patent Application 61610818
Patent Application Provisional
App. No. 61/610,818 · Confirmation No. 5282

CMP COMPOSITIONS SELECTIVE FOR OXIDE AND NITRIDE WITH HIGH REMOVAL RATE AND LOW DEFECTIVITY

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-04-02 APP.FILE.REC Filing Receipt 3 View
2012-03-14 TR.PROV Provisional Cover Sheet (SB16) 2 View
2012-03-14 SPEC Specification 41 View
2012-03-14 CLM Claims 7 View
2012-03-14 ABST Abstract 1 View
2012-03-14 ADS Application Data Sheet 5 View
2012-03-14 WFEE Fee Worksheet (SB06) 2 View
2012-03-14 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/610,818
Filed
2012-03-14