IP Library › Patent Application 61625571
Patent Application Provisional
App. No. 61/625,571 · Confirmation No. 8957

CARBON DOPANT GAS AND CO-FLOW FOR IMPLANT BEAM AND SOURCE LIFE PERFORMANCE IMPROVEMENT

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2012-05-07 APP.FILE.REC Filing Receipt 3 View
2012-04-17 TR.PROV Provisional Cover Sheet (SB16) 4 View
2012-04-17 ADS Application Data Sheet 5 View
2012-04-17 SPEC Specification 19 View
2012-04-17 CLM Claims 7 View
2012-04-17 ABST Abstract 1 View
2012-04-17 DRW.NONBW Drawings-other than black and white line drawings 3 View
2012-04-17 WFEE Fee Worksheet (SB06) 2 View
2012-04-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
2012-04-17 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
0001-01-03 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
61/625,571
Filed
2012-04-17