IP Library › Patent Application 61732180
Patent Application Provisional Small
App. No. 61/732,180 · Confirmation No. 9405

CONTROLLING THE UNIFORMITY OF PECVD DEPOSITION USING MAGNETIC FIELDS

Provisional Application Expired
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 Code Description Pages PDF
2024-09-04 OATH Oath or Declaration filed 19 View
2013-02-04 APP.FILE.REC Filing Receipt 3 View
2013-01-23 CFILE Request for Corrected Filing Receipt 2 View
2013-01-23 WFEE Fee Worksheet (SB06) 2 View
2013-01-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-01-23 ADS Application Data Sheet 7 View
2012-12-28 APP.FILE.REC Filing Receipt 3 View
2012-12-19 WFEE Fee Worksheet (SB06) 1 View
2012-11-30 TR.PROV Provisional Cover Sheet (SB16) 3 View
2012-11-30 SPEC Specification 157 View
2012-11-30 CLM Claims 77 View
2012-11-30 ABST Abstract 1 View
2012-11-30 DRW Drawings-only black and white line drawings 21 View
2012-11-30 WFEE Fee Worksheet (SB06) 2 View
2012-11-30 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/732,180
Filed
2012-11-30