Patent Application
Provisional
App. No. 61/752,202
· Confirmation No. 6281
MULTIPLE ANGLE OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEM
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-02-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-01-14 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2013-01-14 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2013-01-14 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-01-14 | SPEC |
Specification | 12 | View | |
| 2013-01-14 | DRW.NONBW |
Drawings-other than black and white line drawings | 6 | View | |
| 2013-01-14 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-01-14 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
David Y. Wang
Santa Clara, CA
Klaus Flock
Mountain View, CA
Lawrence Rotter
Pleasanton, CA
Shankar Krishnan
Santa Clara, CA
Johannes D. de Veer
Menlo Park, CA
Catalin Filip
Pleasanton, CA
Gregory Brady
San Jose, CA
Muzammil Arain
Santa Clara, CA
Andrei Shchegrov
Campbell, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23584
- Docket No.
- P4030
- Confirmation No.
- 6281
Child
Claims priority from a provisional application
→
App. 14/043,783
· US 9,116,103
Filed 2013-10-01
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/745,047
· US 9,310,290
Filed 2015-06-19
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2014/055666
Filed 2014-09-15
· RO PROCESSING COMPLETED-PLACED IN STORAGE
from
FLOCK, KLAUS,
ROTTER, LAWRENCE,
FILIP, CATALIN,
ARAIN, MUZAMMIL,
BRADY, GREGORY,
DE VEER, JOHANNES D.,
SHCHEGROV, ANDREI,
WANG, DAVID Y.,
KRISHNAN, SHANKAR
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2013-10-01
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Quick Facts
- App. No.
- 61/752,202
- Filed
- 2013-01-14
External Links