IP Library › Patent Application 61800660
Patent Application Provisional Small
App. No. 61/800,660 · Confirmation No. 2931

CONTROLLING THE UNIFORMITY OF PECVD DEPOSITION USING ELECTRON BOTTLES AND ANTI-COUNTERFEITING FEATURES

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2024-09-04 OATH Oath or Declaration filed 19 View
2013-05-23 APP.FILE.REC Filing Receipt 3 View
2013-03-15 TR.PROV Provisional Cover Sheet (SB16) 3 View
2013-03-15 DRW Drawings-only black and white line drawings 27 View
2013-03-15 SPEC Specification 203 View
2013-03-15 CLM Claims 102 View
2013-03-15 ABST Abstract 1 View
2013-03-15 WFEE Fee Worksheet (SB06) 2 View
2013-03-15 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/800,660
Filed
2013-03-15