IP Library › Patent Application 61830533
Patent Application Provisional
App. No. 61/830,533 · Confirmation No. 1066

Dynamically removing correlation of highly-correlated parameters in optical metrology

Provisional Application Expired
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 Code Description Pages PDF
2013-06-11 APP.FILE.REC Filing Receipt 3 View
2013-06-03 SPEC Specification 4 View
2013-06-03 TR.PROV Provisional Cover Sheet (SB16) 3 View
2013-06-03 WFEE Fee Worksheet (SB06) 2 View
2013-06-03 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
61/830,533
Filed
2013-06-03