Patent Application
Provisional
App. No. 61/872,297
· Confirmation No. 5630
COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
Inventors:
Emanuel I. COOPER, Li-Min CHEN, Steven LIPPY, Chai-Jung Hsu, Sheng-Hung Tu, Chieh Ju Wang
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2013-10-24 | R48.REQ |
Request under Rule 48 correcting inventorship | 2 | View | |
| 2013-10-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-10-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-09-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-08-30 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-08-30 | SPEC |
Specification | 15 | View | |
| 2013-08-30 | CLM |
Claims | 4 | View | |
| 2013-08-30 | ABST |
Abstract | 1 | View | |
| 2013-08-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-08-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Emanuel I. COOPER
Scarsdale, NY
Li-Min CHEN
Danbury, CT
Steven LIPPY
Danbury, CT
Chai-Jung Hsu
Danbury, CT
Sheng-Hung Tu
Danbury, CT
Chieh Ju Wang
Danbury, CT
Attorneys & Agents of Record
Prosecution
- Customer No.
- 24239
- Docket No.
- 020732-988.1165 US PRV
- Confirmation No.
- 5630
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
from
HSU, CHIA-JUNG,
TU, SHENG-HUNG,
WANG, CHIEH JU,
CHEN, LI-MIN,
COOPER, EMANUEL I.,
LIPPY, STEVEN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-18
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Quick Facts
- App. No.
- 61/872,297
- Filed
- 2013-08-30
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