IP Library › Patent Application 61878561
Patent Application Provisional
App. No. 61/878,561 · Confirmation No. 1299

MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEM AND METHODS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2013-10-09 APP.FILE.REC Filing Receipt 3 View
2013-09-16 DRW.SUPP Drawings-black and white line and/or other drawings — View
2013-09-16 TR.PROV Provisional Cover Sheet (SB16) 3 View
2013-09-16 SPEC Specification 40 View
2013-09-16 CLM Claims 14 View
2013-09-16 ABST Abstract 1 View
2013-09-16 DRW.NONBW Drawings-other than black and white line drawings 12 View
2013-09-16 WFEE Fee Worksheet (SB06) 2 View
2013-09-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-09-16 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
61/878,561
Filed
2013-09-16