Patent Application
Provisional
App. No. 61/916,543
· Confirmation No. 1081
Ni:NiGe:Ge SELECTIVE ETCH FORMULATIONS AND METHOD OF USING SAME
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-08 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-16 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2013-12-16 | SPEC |
Specification | 12 | View | |
| 2013-12-16 | CLM |
Claims | 3 | View | |
| 2013-12-16 | ABST |
Abstract | 1 | View | |
| 2013-12-16 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-16 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 24239
- Docket No.
- 020732-1009.1172 US PRV
- Confirmation No.
- 1081
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-02-04
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Quick Facts
- App. No.
- 61/916,543
- Filed
- 2013-12-16
External Links