Patent Application
Provisional
App. No. 61/918,943
· Confirmation No. 7451
Titanium Nitride Hard Mask and Etch Residue Removal
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-06-02 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2015-03-06 | OATH |
Oath or Declaration filed | 4 | View | |
| 2013-12-26 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-20 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-12-20 | SPEC |
Specification | 13 | View | |
| 2013-12-20 | CLM |
Claims | 6 | View | |
| 2013-12-20 | ABST |
Abstract | 1 | View | |
| 2013-12-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
William Jack Casteel, Jr.
Emmaus, PA
Seiji Inaoka
Midland, MI
Madhukar Bhaskara Rao
Fogelsville, PA
Brenda Faye Ross
Whitehall, PA
Yi-Chia Lee
Chupei City, TAIWAN
Wen Dar Liu
Chupei City, TAIWAN
Attorneys & Agents of Record
Prosecution
- Customer No.
- 143749
- Docket No.
- 07788Z USA
- Confirmation No.
- 7451
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-02-20
from
CASTEEL, WILLIAM JACK, JR.,
INAOKA, SEIJI,
ROSS, BRENDA FAYE,
RAO, MADHUKAR BHASKARA,
LEE, YI-CHIA,
LIU, WEN DAR
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-03-06
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Quick Facts
- App. No.
- 61/918,943
- Filed
- 2013-12-20
External Links