Patent Application
Provisional
App. No. 61/919,177
· Confirmation No. 8169
USE OF NON-OXIDIZING STRONG ACIDS FOR THE REMOVAL OF ION-IMPLANTED RESIST
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-07-09 | R48.REQ |
Request under Rule 48 correcting inventorship | 2 | View | |
| 2014-07-09 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2014-07-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-07-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2014-01-10 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-20 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2013-12-20 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2013-12-20 | SPEC |
Specification | 14 | View | |
| 2013-12-20 | CLM |
Claims | 4 | View | |
| 2013-12-20 | ABST |
Abstract | 1 | View | |
| 2013-12-20 | DRW.NONBW |
Drawings-other than black and white line drawings | 5 | View | |
| 2013-12-20 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2013-12-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Steven Bilodeau
Oxford, CT
Emanuel I. Cooper
Scarsdale, NY
Jerry Lee
Hsin-Chu, TAIWAN
WonLae Kim
Hsin-Chu, TAIWAN
Attorneys & Agents of Record
Prosecution
- Customer No.
- 24239
- Docket No.
- 020732-1007.1170 US PRV
- Confirmation No.
- 8169
Child
Claims priority from a provisional application
→
App. 15/105,833
Filed 2016-06-17
· Abandoned -- Failure to Pay Issue Fee
Child
Claims priority from a provisional application
→
App. 15/892,775
· US 10,347,504
Filed 2018-02-09
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2014/071540
Filed 2014-12-19
· RO PROCESSING COMPLETED-PLACED IN STORAGE
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-12-09
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-12-09
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
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Quick Facts
- App. No.
- 61/919,177
- Filed
- 2013-12-20
External Links