Patent Application
Provisional
App. No. 61/921,546
· Confirmation No. 5208
Cathode arrangement, electron gun, and lithography system comprising such a electron gun
Applicant:
MAPPER LITHOGRAPHY IP B.V.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-01-27 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2013-12-30 | ADS |
Application Data Sheet | 7 | View | |
| 2013-12-30 | SPEC |
Specification | 41 | View | |
| 2013-12-30 | CLM |
Claims | 2 | View | |
| 2013-12-30 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2013-12-30 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-12-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-12-30 | PD.TO.AUTH |
Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office | 2 | View | |
| 2013-12-30 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View |
Inventors
Laura DINU-GÜRTLER
DELFT, NETHERLANDS
Eric Petrus HOGERVORST
HAARLEM, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 32894
- Docket No.
- 03147.0097.USV0
- Confirmation No.
- 5208
Child
Claims priority from a provisional application
→
App. 14/578,525
· US 9,455,112
Filed 2014-12-22
· Patented Case
Child
Claims priority from a provisional application
→
App. 15/203,888
· US 10,622,188
Filed 2016-07-07
· Patented Case
Child
Claims priority from a provisional application
→
App. 14/578,533
· US 9,466,453
Filed 2014-12-22
· Patented Case
COURT APPOINTMENT
Recorded 2019-05-07
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Quick Facts
- App. No.
- 61/921,546
- Filed
- 2013-12-30
External Links