IP Library Patent Application 61937135
Patent Application Provisional
App. No. 61/937,135 · Confirmation No. 9210

ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME

Applicant: Entegris, Inc.
Provisional Application Expired
⬇ PDF
Code Description Pages PDF
2014-03-07 APP.FILE.REC Filing Receipt 3 View
2014-02-07 ADS Application Data Sheet 8 View
2014-02-07 DRW Drawings-only black and white line drawings 5 View
2014-02-07 SPEC Specification 15 View
2014-02-07 CLM Claims 10 View
2014-02-07 ABST Abstract 1 View
2014-02-07 TR.PROV Provisional Cover Sheet (SB16) 4 View
2014-02-07 WFEE Fee Worksheet (SB06) 2 View
2014-02-07 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
61/937,135
Filed
2014-02-07