Patent Application
Provisional
App. No. 61/937,135
· Confirmation No. 9210
ELECTROSTATIC CHUCK AND METHOD OF MAKING SAME
Inventors:
Richard A. Cooke, Wolfram Neff, Carlo Waldfried, Jakub Rybczynski, Michael Hanagan, Wade Krull
Applicant:
Entegris, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2014-03-07 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-02-07 | ADS |
Application Data Sheet | 8 | View | |
| 2014-02-07 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2014-02-07 | SPEC |
Specification | 15 | View | |
| 2014-02-07 | CLM |
Claims | 10 | View | |
| 2014-02-07 | ABST |
Abstract | 1 | View | |
| 2014-02-07 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2014-02-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-02-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Richard A. Cooke
Framingham, MA
Wolfram Neff
Woburn, MA
Carlo Waldfried
Middleton, MA
Jakub Rybczynski
Arlington, MA
Michael Hanagan
Rutland, MA
Wade Krull
Marblehead, MA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 21005
- Docket No.
- 3194.1098-000
- Confirmation No.
- 9210
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
ENTEGRIS, INC.,
POCO GRAPHITE, INC.,
ATMI, INC.,
ATMI PACKAGING, INC.,
ADVANCED TECHNOLOGY MATERIALS, INC.
RELEASE OF SECURITY INTEREST
Recorded 2018-11-08
from
HANAGAN, MICHAEL,
KRULL, WADE,
NEFF, WOLFRAM,
RYBCZYNSKI, JAKUB,
WALDFRIED, CARLO,
COOKE, RICHARD A.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2014-05-20
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-02
from
ADVANCED TECHNOLOGY MATERIALS, INC.,
ATMI PACKAGING, INC.,
ATMI, INC.,
ENTEGRIS, INC.,
POCO GRAPHITE, INC.
SECURITY INTEREST
Recorded 2014-05-01
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Quick Facts
- App. No.
- 61/937,135
- Filed
- 2014-02-07
External Links