Patent Application
Provisional
App. No. 61/942,676
· Confirmation No. 6346
Proximity effect correction in a charged particle lithography system
Inventor:
Marco Jan-Jaco WIELAND
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-03-09 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2015-02-26 | PA.. |
Power of Attorney | 1 | View | |
| 2015-02-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2015-02-26 | PA.. |
Power of Attorney | 1 | View | |
| 2014-03-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2014-02-21 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2014-02-21 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2014-02-21 | SPEC |
Specification | 30 | View | |
| 2014-02-21 | CLM |
Claims | 6 | View | |
| 2014-02-21 | ABST |
Abstract | 1 | View | |
| 2014-02-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2014-02-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Marco Jan-Jaco WIELAND
Delft, NETHERLANDS
Attorneys & Agents of Record
Prosecution
- Customer No.
- 8791
- Docket No.
- USP194906A
- Confirmation No.
- 6346
COURT APPOINTMENT
Recorded 2019-05-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-02-19
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Quick Facts
- App. No.
- 61/942,676
- Filed
- 2014-02-21
External Links