Patent Application
Provisional
App. No. 62/201,955
· Confirmation No. 1120
CONTROLLED FLUID FLOW FOR CLEANING AN OPTICAL ELEMENT
Applicant:
ASML Netherlands B.V.
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2015-08-21 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2015-08-06 | ADS |
Application Data Sheet | 8 | View | |
| 2015-08-06 | SPEC |
Specification | 49 | View | |
| 2015-08-06 | CLM |
Claims | 6 | View | |
| 2015-08-06 | ABST |
Abstract | 1 | View | |
| 2015-08-06 | DRW |
Drawings-only black and white line drawings | 27 | View | |
| 2015-08-06 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2015-08-06 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Silvia De Dea
San Diego, CA
Chunguang Xia
San Diego, CA
Gregory Wilson
San Diego, CA
Brandon Verhoff
San Diego, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 86823
- Docket No.
- 2015P00098US/002-127P01
- Confirmation No.
- 1120
Child
Claims priority from a provisional application
→
App. 15/690,707
· US 10,232,413
Filed 2017-08-30
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2016/045200
Filed 2016-08-02
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 14/937,973
· US 9,776,218
Filed 2015-11-11
· Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2015-11-11
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Quick Facts
- App. No.
- 62/201,955
- Filed
- 2015-08-06
External Links