IP Library › Patent Application 62286606
Patent Application Provisional
App. No. 62/286,606 · Confirmation No. 4906

Chemical Mechanical Planarization of Silicon Containing Materials

Provisional Application Expired
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2017-06-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2016-02-29 OATH Oath or Declaration filed 4 View
2016-02-25 APP.FILE.REC Filing Receipt 3 View
2016-01-25 PD.TO.AUTH Authorization or Rescission of Authorization to Access Application by Digital Access Service /Priority Document Exchange Office 2 View
2016-01-25 WFEE Fee Worksheet (SB06) 2 View
2016-01-25 N417 Electronic Filing System Acknowledgment Receipt 3 View
2016-01-25 TR.PROV Provisional Cover Sheet (SB16) 4 View
2016-01-25 SPEC Specification 22 View
2016-01-25 CLM Claims 8 View
2016-01-25 ABST Abstract 1 View
2016-01-25 DRW Drawings-only black and white line drawings 2 View
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Quick Facts
App. No.
62/286,606
Filed
2016-01-25