Patent Application
Provisional
App. No. 62/353,245
· Confirmation No. 1010
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING
Applicant:
NIKON CORPORATION
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-07-12 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2016-06-22 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2016-06-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2016-06-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2016-06-22 | ADS |
Application Data Sheet | 9 | View | |
| 2016-06-22 | SPEC |
Specification | 35 | View | |
| 2016-06-22 | CLM |
Claims | 4 | View | |
| 2016-06-22 | ABST |
Abstract | 1 | View | |
| 2016-06-22 | DRW |
Drawings-only black and white line drawings | 15 | View | |
| 2016-06-22 | N417.CORR |
Electronic Filing System Acknowledgment Receipt (Corrected) | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 25220
- Docket No.
- PA1668PRV/11269.288.PRV
- Confirmation No.
- 1010
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Claims priority from a provisional application
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App. 15/629,353
· US 10,295,911
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· Patented Case
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App. 16/379,010
· US 10,747,117
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App. 16/914,143
· US 11,067,900
Filed 2020-06-26
· Patented Case
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Claims priority from a provisional application
→
App. 15/599,197
· US 10,890,849
Filed 2017-05-18
· Patented Case
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Claims priority from a provisional application
→
App. 15/599,148
· US 11,099,483
Filed 2017-05-18
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2017/037786
Filed 2017-06-15
· PCT - International Search Report Mailed to IB
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Claims priority from a provisional application
→
App. 16/307,892
· US 10,712,671
Filed 2018-12-06
· Patented Case
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PCT
Claims priority from a provisional application
→
PCT/US2017/033637
· International Application Withdrawn
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-10-18
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Quick Facts
- App. No.
- 62/353,245
- Filed
- 2016-06-22
External Links