IP Library › Patent Application 62473068
Patent Application Provisional
App. No. 62/473,068 · Confirmation No. 2329

MAGNETRON SPUTTERING APPARATUS AND FILM FORMATION METHOD USING MAGNETRON SPUTTERING APPARATUS

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2017-09-26 TRAN.LET Transmittal Letter 1 View
2017-09-26 TRAN.LET Transmittal Letter 1 View
2017-09-26 SPEC Specification 14 View
2017-09-26 CLM Claims 5 View
2017-09-26 ABST Abstract 1 View
2017-09-26 DRW Drawings-only black and white line drawings 5 View
2017-09-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-03-22 APP.FILE.REC Filing Receipt 3 View
2017-03-22 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2017-03-17 ADS Application Data Sheet 9 View
2017-03-17 SPECNO Specification - Not in English 14 View
2017-03-17 DRW Drawings-only black and white line drawings 5 View
2017-03-17 WFEE Fee Worksheet (SB06) 2 View
2017-03-17 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/473,068
Filed
2017-03-17