IP Library › Patent Application 62489806
Patent Application Provisional
App. No. 62/489,806 · Confirmation No. 1268

SEMICONDUCTOR WAFER PROCESSING CHAMBER

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2017-06-27 R48.REQ.G Acceptance of Request under Rule 48 to correct inventorship or name 1 View
2017-06-27 APP.FILE.REC Filing Receipt 3 View
2017-06-21 R48.REQ Request under Rule 48 correcting inventorship 2 View
2017-06-21 WFEE Fee Worksheet (SB06) 2 View
2017-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-06-21 ADS Application Data Sheet 8 View
2017-05-04 APP.FILE.REC Filing Receipt 3 View
2017-05-02 ADS Application Data Sheet 8 View
2017-05-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-04-25 ADS Application Data Sheet 9 View
2017-04-25 TR.PROV Provisional Cover Sheet (SB16) 2 View
2017-04-25 SPEC Specification 27 View
2017-04-25 CLM Claims 5 View
2017-04-25 ABST Abstract 1 View
2017-04-25 DRW Drawings-only black and white line drawings 38 View
2017-04-25 WFEE Fee Worksheet (SB06) 2 View
2017-04-25 N417 Electronic Filing System Acknowledgment Receipt 3 View
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Quick Facts
App. No.
62/489,806
Filed
2017-04-25