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App. No. 16/656,037 · Confirmation No. 3111

SEMICONDUCTOR WAFER PROCESSING CHAMBER

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2025-06-16 OATH Oath or Declaration filed 43 View
2022-08-26 ABN Abandonment 2 View
2022-02-17 CTRS Requirement for Restriction/Election 5 View
2022-02-17 FWCLM Index of Claims 1 View
2020-05-22 NTC.PUB Notice of Publication 1 View
2020-02-12 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2020-02-10 PA.. Power of Attorney 2 View
2020-02-10 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-02-10 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2020-02-10 ADS Application Data Sheet 10 View
2020-02-10 N572 Response - Re: Informal Power of Attorney (PTOL-308) 1 View
2020-02-10 APP.FILE.REC Filing Receipt 4 View
2020-02-10 WFEE Fee Worksheet (SB06) 1 View
2020-02-05 PA.. Power of Attorney 2 View
2020-02-05 R3.73 Assignee showing of ownership per 37 CFR 3.73 12 View
2020-02-05 ADS Application Data Sheet 10 View
2020-02-05 WFEE Fee Worksheet (SB06) 2 View
2020-02-05 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-02-05 PEFR Applicant Response to Pre-Exam Formalities Notice 2 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 OATH Oath or Declaration filed 1 View
2020-02-05 DRW Drawings-only black and white line drawings 7 View
2019-11-05 WFEE Fee Worksheet (SB06) 1 View
2019-11-05 APP.FILE.REC Filing Receipt 4 View
2019-11-05 NTC.MISS.PRT Notice to File Missing Parts 3 View
2019-10-22 ADS Application Data Sheet 10 View
2019-10-22 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-10-17 PA.. Power of Attorney 2 View
2019-10-17 DRW.NONBW Drawings-other than black and white line drawings 63 View
2019-10-17 ABST Abstract 1 View
2019-10-17 CLM Claims 3 View
2019-10-17 SPEC Specification 52 View
2019-10-17 TRNA Transmittal of New Application 1 View
2019-10-17 N417 Electronic Filing System Acknowledgment Receipt 5 View
2019-10-17 ADS Application Data Sheet 11 View
2019-10-17 FOR Foreign Reference 26 View
2019-10-17 FOR Foreign Reference 11 View
2019-10-17 FOR Foreign Reference 14 View
2019-10-17 FOR Foreign Reference 14 View
2019-10-17 FOR Foreign Reference 31 View
2019-10-17 FOR Foreign Reference 16 View
2019-10-17 FOR Foreign Reference 19 View
2019-10-17 FOR Foreign Reference 26 View
2019-10-17 FOR Foreign Reference 8 View
2019-10-17 FOR Foreign Reference 5 View
2019-10-17 FOR Foreign Reference 19 View
2019-10-17 FOR Foreign Reference 23 View
2019-10-17 FOR Foreign Reference 20 View
2019-10-17 FOR Foreign Reference 27 View
2019-10-17 FOR Foreign Reference 9 View
2019-10-17 REF.OTHER Other reference-Patent/Application/Search Documents 12 View
2019-10-17 REF.OTHER Other reference-Patent/Application/Search Documents 8 View
2019-10-17 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2019-10-17 TRAN.LET Transmittal Letter 5 View
2019-10-17 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2019-10-17 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
16/656,037
Filed
2019-10-17
Pub. No.
US20200161146A1
Examiner
LEE, KEVIN G
Art Unit
1711