Patent Assignment
Reel/Frame 058533/0321
Patent Security Agreement
Recorded: 2021-12-16
Pages: 69
Assignor
VEECO INSTRUMENTS INC.
Executed: 2021-12-16
Assignee
HSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
95 WASHINGTON STREET, FLOOR 2SOUTH, BUFFALO, NEW YORK, 14203
Covered Properties
(212)
Ion Beam Deposition of a Low Resistivity Metal
Application:
17/197,885 →
Publication:
US US20210292889A1
Apparatus and Method for Die Stack Flux Removal
Enhanced Cathodic Arc Source for Arc Plasma Deposition
Molecular Beam Epitaxy Systems with Variable Substrate-to-Source Arrangements
Application:
17/074,350 →
Publication:
US US20210115588A1
CVD Reactor Single Substrate Carrier and Rotating Tube for Stable Rotation
Application:
16/868,082 →
Publication:
US US20210095374A1
Melt Detection Systems and Methods of Using the Same
Deposition System with Integrated Carrier Cleaning Modules
Rotating Disk Reactor with Self-Locking Carrier-to-Support Interface for Chemical Vapor Deposition
Application:
16/752,661 →
Publication:
US US20200248307A1
Semiconductor Wafer Processing Chamber
Application:
16/656,037 →
Publication:
US US20200161146A1
System and Method for Self-Cleaning Wet Treatment Process
High Pressure Spray Head
High-Efficiency Line-Forming Optical Systems and Methods Using A Serrated Spatial Filter
Chemical Vapor Deposition Apparatus with Multi-Zone Injection Block
Wafer Carrier Having Retention Pockets with Compound Radii for Chemical Vapor Deposition Systems
Semiconductor Wafer Processing Chamber
Ion Beam Deposition of a Low Resistivity Metal
Application:
17/475,027 →
Publication:
US US20210404051A1
Automated Batch Production Thin Film Deposition Systems and Methods of Using the Same
Reactor with Centering Pin for Epitaxial Deposition
Wafer Carrier Assembly with Pedestal and Cover Restraint Arrangements That Control Thermal Gaps
Application:
17/462,990 →
Publication:
US US20230060609A1
Adaptive Controller for Ion Source
Grid Transparency and Grid Hole Pattern Control for Ion Beam Uniformity
Grid Transparency and Grid Hole Pattern Control for Ion Beam Uniformity
Grid Providing Beamlet Steering
Fault Tolerant Ion Source Power System
Fluid-Cooled Ion Source
Minimal Force Air Bearing for Lapping Tool
Patent:
7,871,306 →
Application:
11/744,874 →
Bridge Row Tool
Patent:
8,066,547 →
Application:
10/993,017 →
Apparatus for Cathodic Vacuum-Arc Coating Deposition
Charged Particle Source and Operation Thereof
Ion Sources and Methods for Generating an Ion Beam with a Controllable Ion Current Density Distribution
Methods of Operating an Electromagnet of an Ion Source
Ion Sources and Methods for Generating an Ion Beam with Controllable Ion Current Density Distribution
Method and Apparatus for Controlling Film Profiles on Topographic Features
Patent:
6,716,322 →
Application:
10/126,928 →
Method and Apparatus for Surface Processing of a Substrate
Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam
Pulsed Operation of Hall-Current Ion Sources
Patent:
6,870,164 →
Application:
09/689,476 →
Film Deposition Assisted by Angular Selective Etch on a Surface
Method for Increased Target Utilization in Ion Beam Deposition Tools
Ion Beam Etching of Stt-Ram Structures
Ion Sources and Methods for Generating Ion Beams with Controllable Ion Current Density Distributions Over Large Treatment Areas
Ion Beam Materials Processing System with Grid Short Clearing System for Gridded Ion Beam Source
Ion Beam Etching
Vapor Deposition Systems and Methods
Vapor Deposition Systems and Methods
Reaction Chamber with Removable Liner
System and Method for Thin Film Deposition
Ald Systems and Methods
Formation of Heteroepitaxial Layers with Rapid Thermal Processing to Remove Lattice Dislocations
Plasma Enhanced Ald System
Method and Apparatus for Forming Device Quality Gallium Nitride Layers on Silicon Substrates
Laser-Assisted Atomic Layer Deposition of 2D Metal Chalcogenide Films
Methods of forming an ALD-inhibiting layer using a self-assembled monolayer
Chuck Systems and Methods Having Enhanced Electrical Isolation For Substrate-Biased ALD
Transportable Semiconductor Wafer Rack
Patent:
908,102 →
Application:
29/680,872 →
Transportable Semiconductor Wafer Rack
Patent:
908,103 →
Application:
29/680,874 →
Deposition of High Vapor Pressure Materials
Vacuum Deposition Sources Having Heated Effusion Orifices
Electrical Contacts for Use with Vacuum Deposition Sources
Electrical Contacts for Use with Vacuum Deposition Sources
Thermally Isolated Cryopanel for Vacuum Deposition Systems
Bellows-Free Retractable Vacuum Deposition Sources
Density-matching alkyl push flow for vertical flow rotating disk reactors
Alkyl Push Flow for Vertical Flow Rotating Disk Reactors
Chemical Vapor Deposition Flow Inlet Elements and Methods
Chemical Vapor Deposition Flow Inlet Elements and Methods
Gas Treatment Systems
Gas Treatment Systems
Method and Apparatus for Measuring the Curvature of Reflective Surfaces
Method for Improving Performance of a Substrate Carrier
Method For Improving Performance Of A Substrate Carrier
Method For Improving Performance Of A Substrate Carrier
Processing Methods and Apparatus with Temperature Distribution Control
Processing Methods and Apparatus with Temperature Distribution Control
Reactor Having a Movable Shutter
Reactor Having a Movable Shutter
Wafer Carrier with Sloped Edge
Exhaust for Cvd Reactor
Gas Injection System for Chemical Vapor Deposition Using Sequenced Valves
Methods and Systems for in-Situ Pyrometer Calibration
Wafer Processing with Carrier Extension
Methods of Wafer Processing with Carrier Extension
Heated Wafer Carrier Profiling
Keyed Wafer Carrier
Rotating Disk Reactor with Ferrofluid Seal for Chemical Vapor Deposition
Radiation Thermometer Using Off-Focus Telecentric Optics
Control of Stray Radiation in a Cvd Chamber
Control of Stray Radiation In A CVD Chamber
TEMPERATURE CONTROL FOR GaN BASED MATERIALS
Wafter Carrier for Chemical Vapor Deposition Systems
Apparatus and Method for Improved Acoustical Transformation
Self-Cleaning Shutter for Cvd Reactor
Wafer Carrier Having Provisions for Improving Heating Uniformity in Chemical Vapor Deposition Systems
Terminal for Mechanical Support of a Heating Element
Wafer Carrier Having Thermal Cover for Chemical Vapor Deposition Systems
Wafer Carrier Having Retention Pockets with Compound Radii for Chemical Vapor Desposition Systems
Enhanced Enclosures for Acoustical Gas Concentration Sensing and Flow Control
Wafer Carrier with a 31-Pocket Configuration
Patent:
793,972 →
Application:
29/522,214 →
Wafer Carrier with a 14-Pocket Configuration
Patent:
793,971 →
Application:
29/522,212 →
Wafer Carrier with a 14-Pocket Configuration
Patent:
852,762 →
Application:
29/612,468 →
Wafer Carrier with a Multi-Pocket Configuration
Patent:
778,247 →
Application:
29/524,104 →
Wafer Carrier with a Multi-Pocket Configuration
Patent:
806,046 →
Application:
29/587,929 →
Self-Centering Wafer Carrier System for Chemical Vapor Deposition
Periphery Purge Shutter and Flow Control Systems and Methods
Gas Concentration Sensors and Systems
Wafer Handling Assembly
Patent:
803,283 →
Application:
29/564,740 →
Seal for Wafer Processing Assembly
Filter Element for Wafer Processing Assembly
Chemical Vapor Deposition Wafer Carrier with Thermal Cover
Patent:
866,491 →
Application:
29/641,924 →
Chemical Vapor Deposition Wafer Carrier with Thermal Cover
Patent:
858,469 →
Application:
29/641,930 →
Chemical Vapor Deposition Wafer Carrier with Thermal Cover
Patent:
863,239 →
Application:
29/641,931 →
Chemical Vapor Deposition Wafer Carrier with Thermal Cover
Patent:
854,506 →
Application:
29/641,933 →
Chemical Vapor Deposition Wafer Carrier with Thermal Cover
Patent:
860,147 →
Application:
29/641,927 →
Micro-LED Transfer Methods Using Light-Based Debonding
Mid-Filament Spacer
Patent:
893,088 →
Application:
29/656,586 →
Multi-Filament Heater Assembly
Patent:
921,431 →
Application:
29/685,939 →
Keyed Wafer Carrier
Patent:
687,790 →
Application:
29/416,220 →
Multi-Keyed Wafer Carrier
Patent:
687,791 →
Application:
29/416,236 →
Multi-Keyed Spindle
Patent:
711,332 →
Application:
29/416,253 →
Keyed Spindle
Patent:
726,133 →
Application:
29/416,216 →
Keyed Spindle
Patent:
748,591 →
Application:
29/514,586 →
Spindle Key
Patent:
712,852 →
Application:
29/416,217 →
Spindle Key
Patent:
744,967 →
Application:
29/499,058 →
Wafer Carrier Having Pockets
Patent:
686,175 →
Application:
29/416,224 →
Wafer Carrier Having Pockets
Patent:
690,671 →
Application:
29/416,228 →
Wafer Carrier Having Pockets
Patent:
695,242 →
Application:
29/416,244 →
Wafer Carrier Having Pockets
Patent:
695,241 →
Application:
29/416,240 →
Wafer Carrier Having Pockets
Patent:
686,582 →
Application:
29/416,238 →
Self-Centering Wafer Carrier for Chemical Vapor Deposition
Patent:
819,580 →
Application:
29/559,939 →
Self-Centering Wafer Carrier For Chemical Vapor Deposition
Patent:
810,705 →
Application:
29/559,977 →
Wafer Carrier with a 33-Pocket Configuration
Patent:
860,146 →
Application:
29/627,938 →
System and Method for Performing a Wet Etching Process
Apparatus and Method to Remove Undissolved Solids from Post Process Dry Film Strip Solvents
Collection Chamber Apparatus to Separate Multiple Fluids During the Semiconductor Wafer Processing Cycle
Collection Chamber Apparatus to Separate Multiple Fluids During the Semiconductor Wafer Processing Cycle
Apparatus for Dual Speed Spin Chuck
Apparatus and Method to Reduce and Control Resistivity of Deionized Water
Apparatus and Method for Metals Free Reduction and Control of Resistivity of Deionized Water
Method of Etching the Back of a Wafer to Expose Tsvs
Two Etch Method for Achieving a Wafer Thickness Profile
Apparatus and Method for Mixing Fluids with Degradational Properties
Apparatus and Method to Control Etch Rate Through Adaptive Spiking of Chemistry
Apparatus and Method to Control Properties of Fluid Discharge Via Refrigerative Exhaust
Two-level Tape Frame Rinse Assembly
Apparatus and Method to Remove Solids from Material Lift Off Post Process Solvents
Apparatus and Method for Wafer Thinning in Advanced Packaging Applications
Apparatus and Method for the Minimization of Undercut During a UBM Etch Process
Apparatus and Method for the Minimization of Undercut During a UBM Etch Process
Silicon Germanium Heterojunction Bipolar Transistor Structure and Method
Improvements in Grounding and Thermal Dissipation for Integrated Circuit Packages
Selective Filling of Electrically Conductive Vias for Three Dimensional Device Structures
Method for Forming Solder Connections on a Circuitized Substrate
Method and Structure for Joining Two Substrates with a Low Melt Solder Joint
Patent:
6,583,517 →
Application:
10/119,491 →
Smt Passive Device Noflow Underfill Methodology and Structure
Selective C4 Connection in Ic Packaging
Patent:
6,650,016 →
Application:
10/262,753 →
Multi-Layered Interconnect Structure Using Liquid Crystalline Polymer Dielectric
Activating Dopants Using Multiple Consecutive Millisecond-Range Anneals
High Density Interconnects
Method of Removing Metallic, Inorganic and Organic Contaminants from Chip Passivation Layer Surfaces
Method of Forming a Lead-Free Tin-Silver-Copper Based Solder Alloy on an Electronic Substrate.
Patent:
6,596,621 →
Application:
10/151,075 →
Negative Volume Expansion Lead-Free Electrical Connection
Patent:
6,649,833 →
Application:
10/215,451 →
High Density Area Array Solder Microjoining Interconnect Structure and Fabrication Method
Ball Grid Array Module and Method of Manufacturing Same
High Density Raised Stud Microjoining System and Methods of Fabricating the Same
High Density Area Array Solder Microjoining Interconnect Structure and Fabrication Method
Dual-Solder Flip-Chip Solder Bump
Lead-Free Alloys for Column/Ball Grid Arrays, Organic Interposers and Passive Component Assembly
Through Silicon via Lithographic Alignment and Registration
Machine-Independent Alignment System and Method
Patent:
6,898,306 →
Application:
09/855,485 →
Dual-Sided Substrate Measurement Apparatus and Methods
Patent:
7,902,040 →
Application:
12/286,762 →
Large-Field Unit-Magnification Projection System
Variable Numerical Aperture Large-Field Unit-Magnification Projection System
Deep Ultraviolet Unit-Magnification Projection Optical System and Projection Exposure Apparatus
Deep Ultraviolet Unit-Magnification Projection Optical System and Projection Exposure Apparatus
Substrate-Alignment Using Detector of Substrate Material
Patent:
44,116 →
Application:
13/366,199 →
LED-based photolithographic illuminator with high collection efficiency
Unit magnification large-format catadioptric lens for microlithography
Wynne-Dyson optical system with variable magnification
Wynne-Dyson projection lens with reduced susceptibility to UV damage
Wafer Chuck Apparatus With Micro-Channel Regions
Scanning Methods for Focus Control for Lithographic Processing of Reconstituted Wafers
Laser Scanning Apparatus and Methods for Thermal Processing
Laser Scanning Apparatus and Methods for Thermal Processing
Laser Thermal Annealing of Lightly Doped Silicon Substrates
Laser Thermal Annealing of Lightly Doped Silicon Substrates
Substrate Processing with Reduced Warpage and/or Controlled Strain
Activating Gan Leds by Laser Spike Annealing and Flash Annealing
Two-Beam Laser Annealing with Improved Temperature Performance
Two-Beam Laser Annealing with Improved Temperature Performance
Dual-Loop Control for Laser Annealing of Semiconductor Wafers
Patent:
8,691,598 →
Application:
13/706,397 →
Laser Annealing Systems and Methods with Ultra-Short Dwell Times
Laser Annealing Systems and Methods with Ultra-Short Dwell Times
Movable microchamber system with gas curtain
Methods of laser processing photoresist in a gaseous environment
Laser Annealing Systems and Methods with Ultra-Short Dwell Times
Laser Annealing Systems and Methods With Ultra-Short Dwell Times
Systems and methods for reducing beam instability in laser annealing
High-efficiency line-forming optical systems and methods
High-efficiency line-forming optical systems and methods using a serrated spatial filter
High-Efficiency Line-Forming Optical Systems and Methods for Defect Annealing and Dopant Activation
Systems and methods for reducing pulsed laser beam profile non-uniformities for laser annealing
Laser-Based Systems and Methods for Melt-Processing of Metal Layers in Semiconductor Manufacturing
Method and System for Laser Thermal Processing of Semiconductor Devices
Patent:
6,844,250 →
Application:
10/390,504 →
Laser Thermal Processing with Laser Diode Radiation
Laser Thermal Annealing of Lightly Doped Silicon Substrates
Heated Chuck for Laser Thermal Processing
Methods and Apparatus for Temperature Measurement and Control on a Remote Substrate Surface
Patent:
7,744,274 →
Application:
11/820,558 →
Heat Shield for Thermal Processing
Apparatus and Method for Improving the Intensity Profile of a Beam Image Used to Process a Substrate
Patent:
8,742,286 →
Application:
13/354,300 →
Methods of Forming a Denuded Zone in a Semiconductor Wafer Using Rapid Laser Annealing
Goniometer
High Na Large-Field Unit-Magnification Projection Optical System
Patent:
7,116,496 →
Application:
10/976,971 →
Apochromatic Unit-Magnification Projection Optical System
Related Assignments
(19)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 15, 2015
From: KRISHNAN, SANDEEP; MOY, KENG; GURARY, ALEXANDER I.; KING, MATTHEW
To: VEECO INSTRUMENTS INC.
Reel/Frame 035414/0004 →
Assignment of Assignor's Interest
Jul 16, 2018
From: BREINGAN, WILLIAM GILBERT; HOFMEISTER, CHRIS; RAPOPORT, LEV; TADDEI, JOHN
To: VEECO PRECISION SURFACE PROCESSING LLC
Reel/Frame 046355/0631 →
Assignment of Assignor's Interest
Jul 15, 2019
From: ANIKITCHEV, SERGEUI
To: ULTRATECH, INC.
Reel/Frame 049749/0275 →
Assignment of Assignor's Interest
Jul 16, 2019
From: HONIGMAN, STEVEN; NULMAN, KENJI
To: VEECO PRECISION SURFACE PROCESSING LLC
Reel/Frame 049766/0930 →
Assignment of Assignor's Interest
Dec 4, 2019
From: NULMAN, KENJI MICHAEL; YANNUZZI, MARK; TYLER, PHILLIP; FIJAL, JONATHAN
To: VEECO PRECISION SURFACE PROCESSING LLC
Reel/Frame 051178/0736 →
Assignment of Assignor's Interest
Dec 30, 2019
From: ULTRATECH, INC.
To: VEECO INSTRUMENTS INC.
Reel/Frame 051446/0476 →
Assignment of Assignor's Interest
Dec 30, 2019
From: VEECO PRECISION SURFACE PROCESSING LLC
To: VEECO INSTRUMENTS INC.
Reel/Frame 051383/0549 →
Assignment of Assignor's Interest
Feb 5, 2020
From: GOLDBERG, DAVID; BIRD, SIMON; BREINGAN, WILLIAM GILBERT; TADDEI, JOHN
To: VEECO PRECISION SURFACE PROCESSING LLC
Reel/Frame 051723/0057 →
Assignment of Assignor's Interest
Jun 30, 2020
From: REED, MATTHEW EARL WALLACE
To: VEECO INSTRUMENTS INC.
Reel/Frame 053090/0042 →
Assignment of Assignor's Interest
Nov 23, 2020
From: DRUZ, BORIS L.; KANAROV, VIKTOR; YEVTUKHOV, YURIY N.; KOHLI, SANDEEP
To: VEECO INSTRUMENTS INC.
Reel/Frame 054442/0864 →
Assignment of Assignor's Interest
Feb 19, 2021
From: TADDEI, JOHN; NULMAN, KENJI; FIJAL, JONATHAN; TYLER, PHILLIP
To: VEECO INSTRUMENTS INC.
Reel/Frame 055334/0511 →
Assignment of Assignor's Interest
Mar 11, 2021
From: SRINIVASAN, NARASIMHAN; HENRY, TANIA; CERIO, FRANK; TURNER, PAUL
To: VEECO INSTRUMENTS INC.
Reel/Frame 055560/0613 →
Assignment of Assignor's Interest
Aug 17, 2021
From: PACIER, MICHAEL W; SERSHEN, MICHAEL J; BERTUCH, ADAM F; LECORDIER, LAURENT
To: VEECO INSTRUMENTS INC.
Reel/Frame 057205/0349 →
Assignment of Assignor's Interest
Sep 2, 2021
From: KRISHNAN, SANDEEP; URBAN, LUKAS
To: VEECO INSTRUMENTS INC.
Reel/Frame 057370/0005 →
Assignment of Assignor's Interest
Sep 14, 2021
From: SRINIVASAN, NARASIMHAN; HENRY, TANIA; CERIO, FRANK; TURNER, PAUL
To: VEECO INSTRUMENTS INC.
Reel/Frame 057481/0020 →
Assignment of Assignor's Interest
Mar 29, 2022
From: MITROVIC, BOJAN; KUNSCH, IAN; GAMARRA, JUAN; DESHPANDE, MANDAR
To: VEECO INSTRUMENTS INC.
Reel/Frame 059429/0949 →
Assignment of Assignor's Interest
Nov 29, 2022
From: GURARY, ALEXANDER I.; DESHPANDE, MANDAR; PARANJPE, AJIT
To: VEECO INSTRUMENTS INC.
Reel/Frame 061909/0563 →
Security Interest
Jun 16, 2025
From: VEECO INSTRUMENTS INC.
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 071649/0225 →
Security Interest
Feb 13, 2026
From: VEECO INSTRUMENTS INC.
To: HSBC BANK USA, NATIONAL ASSOCIATION
Reel/Frame 073780/0494 →