Apparatus and method for improving the intensity profile of a beam image used to process a substrate
View Patent ↗Methods and apparatuses are provided for improving the intensity profile of a beam image used to process a semiconductor substrate. At least one photonic beam may be generated and manipulated to form an image having an intensity profile with an extended uniform region useful for thermally processing the surface of the substrate. The image may be scanned across the surface to heat at least a portion of the substrate surface to achieve a desired temperature within a predetermined dwell time. Such processing may achieve a high efficiency due to the large proportion of energy contained in the uniform portion of the beam.
1. An apparatus for processing a substrate comprising:
a first radiation source adapted to emit a photonic beam having a wavelength longer than 1 micrometer and a total beam energy;
a stage having a surface adapted to support the substrate;
an optical system adapted to receive the emitted beam and create therefrom an imaging beam incident on a surface of the substrate, wherein the imaging beam is capable of forming a putative image having a substantially uniform intensity profile over a useful portion thereof on the surface of the substrate, wherein the useful portion of putative unmodified image has an energy utilization of less than 15% of the total beam energy;
a second radiation source adapted to emit compensating radiation, the compensating radiation and the imaging beam in combination forming an image having a useful portion containing at least 15% of the total beam energy, wherein the useful portion has a substantially uniform intensity profile that is entirely within a range of about 98% to 100% of the peak intensity value of the imaging beam; and
a controller operably coupled to the stage, wherein the controller is programmed to provide relative movement between the stage and the beam to scan the image across the surface of the substrate to heat at least a portion of the substrate at and/or near the surface to achieve a desired temperature within a predetermined dwell time, D.
2. The apparatus of claim 1 , wherein the second radiation source comprises an array of light emitting photodiodes or laser diodes.
3. The apparatus of claim 2 , wherein each photodiode or laser diode has an adjustable radiation output.