Laser annealing systems and methods with ultra-short dwell times

1. A system for annealing a semiconductor wafer having a patterned surface with a wafer surface or subsurface temperature T S and a melt temperature T M , comprising:

a pre-heat laser system that forms a pre-heat laser beam that forms a pre-heat line image on the patterned surface, the pre-heat line image being configured to heat a portion of the patterned surface to a pre-anneal temperature T PA in the range (0.5)·T M ≤T PA ≤(0.9)·T M , wherein the pre-heat line image has a long direction with a length L 1 between 5 mm and 20 mm and a narrow direction having a width W 1 ;

an annealing laser system that forms a scanned laser beam that forms an annealing image on the wafer surface such that the annealing image overlaps a portion of the pre-heat line image to define a scanning overlap region, the annealing image having a long direction with a length L 2 in the range from 100 microns to 200 microns and a narrow direction having a width W 2 in the range from 10 microns to 25 microns, wherein the length L 2 ≥2·W 1 , and wherein the lengths L 1 and L 2 are measured in orthogonal directions; and

wherein the annealing laser system includes a scanning optical system that scans the annealing image relative to the pre-heat line image so that the scanning overlap region has a dwell time τ D in the range of 10 ns≤τ D ≤500 ns and locally raises the wafer surface or subsurface temperature T S from the pre-anneal temperature T PA to the melt temperature T M within the scanning overlap region.

2. The system according to claim 1 , wherein the dwell time τ D is in the range 25 ns≤τ D ≤250 ns.

3. The system according to claim 1 , further including a thermal emission detector system that measures the thermal emission from the scanning overlap region.

4. The system according to claim 1 , wherein the wafer is supported by a chuck which in turn is supported by a moveable wafer stage, wherein the annealing image scans in an annealing direction, and wherein the wafer stage moves to scan the pre-heat line image in a pre-heat scan direction that is orthogonal to the annealing direction.

5. The system according to claim 1 , wherein the pre-heat line image heats the wafer surface or subsurface to the pre-anneal temperature T PA in the range (0.6)·T M ≤T PA ≤(0.8)·T M .

6. The system according to claim 1 , wherein the annealing laser system includes an anneal laser that operates in a quasi-continuous-wave (QCW) regime so that the scanning laser beam includes light pulses, wherein each point on the wafer surface over which the scanning overlap region passes receives at least 5 light pulses.

7. The system according to claim 6 , wherein the quasi-continuous-wave regime has a frequency of 100 MHz or greater.

8. The system according to claim 6 , wherein the anneal laser includes an infrared-pumped fiber laser with a frequency doubling crystal, and wherein the scanning laser beam has a wavelength of 532 nm.

9. The system according to claim 8 , wherein the pre-heat laser beam has an infrared wavelength.

10. The system according to claim 1 , wherein the annealing laser system includes an anneal laser that generates an initial laser beam, and wherein the scanning optical system includes a rotating polygonal mirror that receives the initial laser beam and forms the scanning laser beam.

11. The system according to claim 10 , wherein the annealing laser system includes a modulator operably connected to a modulator driver, wherein the modulator is arranged in the in the initial laser beam and blocks the initial laser beam when the annealing image completes its scan and transmits the initial laser beam on when the annealing image starts another scan.