Patent Application
Provisional
App. No. 62/492,692
· Confirmation No. 6232
DOUBLE SPACER IMMERSION LITHOGRAPHY TRIPLE PATTERNING FLOW AND METHOD
Inventor:
Richard T. Schultz
Applicant:
Advanced Micro Devices, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-05-10 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-05-01 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2017-05-01 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2017-05-01 | ADS |
Application Data Sheet | 8 | View | |
| 2017-05-01 | SPEC |
Specification | 12 | View | |
| 2017-05-01 | CLM |
Claims | 1 | View | |
| 2017-05-01 | DRW.NONBW |
Drawings-other than black and white line drawings | 13 | View | |
| 2017-05-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-05-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-05-01 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Richard T. Schultz
Fort Collins, CO
Attorneys & Agents of Record
Prosecution
- Customer No.
- 53806
- Docket No.
- 5800-63400
- Confirmation No.
- 6232
Child
PCT
Claims priority from a provisional application
→
PCT/US2018/029702
Filed 2018-04-27
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 15/608,749
· US 10,304,728
Filed 2017-05-30
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/422,144
· US 10,784,154
Filed 2019-05-24
· Patented Case
from
SCHULTZ, RICHARD T.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2017-06-13
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Quick Facts
- App. No.
- 62/492,692
- Filed
- 2017-05-01
External Links