IP Library › Patent Application 62500609
Patent Application Provisional
App. No. 62/500,609 · Confirmation No. 7150

METHOD AND APPARATUS FOR UNIFORM THERMAL DISTRIBUTION IN A MICROWAVE CAVITY DURING SEMICONDUCTOR PROCESSING

Provisional Application Expired
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 Code Description Pages PDF
2017-05-12 APP.FILE.REC Filing Receipt 3 View
2017-05-03 PA.. Power of Attorney 2 View
2017-05-03 WFEE Fee Worksheet (SB06) 2 View
2017-05-03 N417 Electronic Filing System Acknowledgment Receipt 3 View
2017-05-03 SPEC Specification 12 View
2017-05-03 CLM Claims 4 View
2017-05-03 ABST Abstract 1 View
2017-05-03 DRW Drawings-only black and white line drawings 5 View
2017-05-03 ADS Application Data Sheet 9 View
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Quick Facts
App. No.
62/500,609
Filed
2017-05-03