METAL-BASED PASSIVATION-ASSISTED PLASMA ETCHING OF III-V SEMICONDUCTORS

Inventors: Sara Elizabeth Harrison, Clint Frye, Rebecca J. Nikolic, Qinghui Shao, Lars Voss

Applicant: Lawrence Livermore National Security, LLC

Provisional Application Expired

	Code	Description	Pages	PDF
2017-05-16	`APP.FILE.REC`	Filing Receipt	3	View
2017-05-05	`ADS`	Application Data Sheet	9	View
2017-05-05	`SPEC`	Specification	32	View
2017-05-05	`CLM`	Claims	3	View
2017-05-05	`ABST`	Abstract	1	View
2017-05-05	`DRW`	Drawings-only black and white line drawings	6	View
2017-05-05	`WFEE`	Fee Worksheet (SB06)	2	View
2017-05-05	`N417`	Electronic Filing System Acknowledgment Receipt	3	View

Inventors

Sara Elizabeth Harrison Fremont, CA

Clint Frye Livermore, CA

Rebecca J. Nikolic Oakland, CA

Qinghui Shao Fremont, CA

Lars Voss Livermore, CA

Attorneys & Agents of Record

DOMINIC KOTAB Reg. 42762 Attorney · ZILKA-KOTAB, P.C.

EDDIE SCOTT Reg. 25220 Attorney · LAWRENCE LIVERMORE NATIONAL LABORATORY

JAMES TAK Reg. 46367 Attorney · LAWRENCE LIVERMORE NATIONAL LABORATORY

ANN LEE Reg. 47741 Attorney · THE CLOROX COMPANY

REBECCA TIE Reg. 62095 Attorney · MAYBACK & HOFFMAN, P.A.

CHRISTOPHER COOK Reg. 71443 Attorney · ZILKA KOTAB, P.C.

MARCELLA BILLSTROM SCHROEDER Reg. 73322 Agent · ZILKA-KOTAB, PC

DERRICK BRESKA Reg. 74266 Agent · ZILKA KOTAB, P.C.

Prosecution

LAWRENCE LIVERMORE NATIONAL SECURITY, LLC

from SHAO, QINGHUI, VOSS, LARS F., FRYE, CLINT, HARRISON, SARA E., NIKOLIC, REBECCA J.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2019-10-14

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