Patent Application
Provisional
Small
App. No. 62/580,240
· Confirmation No. 4969
AREA SELECTIVE CVD OF METALLIC FILMS USING PRECURSOR GASES AND INHIBITORS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2017-11-29 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2017-11-01 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2017-11-01 | APPENDIX |
Appendix to the specification | 1 | View | |
| 2017-11-01 | SPEC |
Specification | 1 | View | |
| 2017-11-01 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2017-11-01 | SPEC |
Specification | 76 | View | |
| 2017-11-01 | CLM |
Claims | 9 | View | |
| 2017-11-01 | ABST |
Abstract | 1 | View | |
| 2017-11-01 | APPENDIX |
Appendix to the specification | 27 | View | |
| 2017-11-01 | DRW.NONBW |
Drawings-other than black and white line drawings | 8 | View | |
| 2017-11-01 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2017-11-01 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2017-11-01 | ADS |
Application Data Sheet | 9 | View | |
| 2017-11-01 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2017-11-01 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View | |
| 2017-11-01 | APPENDIX.SUPP |
Appendix to the specification | — | View |
Inventors
John R. ABELSON
Urbana, IL
Elham MOHIMI
Urbana, IL
Gregory S. GIROLAMI
Urbana, IL
Sumeng LIU
Urbana, IL
Zhejun ZHANG
Urbana, IL
Attorneys & Agents of Record
Prosecution
- Customer No.
- 23713
- Docket No.
- 595091: 101-17P US
- Confirmation No.
- 4969
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2022-08-29
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2018-06-04
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Quick Facts
- App. No.
- 62/580,240
- Filed
- 2017-11-01
External Links