Patent Application
Provisional
App. No. 62/631,674
· Confirmation No. 7620
DEPOSITION RING FOR PROCESSING REDUCED SIZE SUBSTRATES
Inventors:
Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Fang Jie Lim, Karrthik Parathithasan, Anand Mahadev, Shoju Vayyapron, Chai Boon Xian
Applicant:
APPLIED MATERIALS, INC.
Provisional Application Expired
|
⬇ PDF
|
Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-02-23 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-02-17 | PA.. |
Power of Attorney | 2 | View | |
| 2018-02-17 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-02-17 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-02-17 | SPEC |
Specification | 13 | View | |
| 2018-02-17 | CLM |
Claims | 2 | View | |
| 2018-02-17 | ABST |
Abstract | 1 | View | |
| 2018-02-17 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2018-02-17 | ADS |
Application Data Sheet | 10 | View |
Inventors
Sriskantharajah Thirunavukarasu
Singapore, SINGAPORE
Eng Sheng Peh
Singapore, SINGAPORE
Fang Jie Lim
Singapore, SINGAPORE
Karrthik Parathithasan
Singapore, SINGAPORE
Anand Mahadev
Bangalore, INDIA
Shoju Vayyapron
Bangalore, INDIA
Chai Boon Xian
Kuching, MALAYSIA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 55649
- Docket No.
- 44015053US01
- Confirmation No.
- 7620
No recorded assignments were found for this patent.
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
- App. No.
- 62/631,674
- Filed
- 2018-02-17
External Links