Patent Application
Provisional
App. No. 62/683,246
· Confirmation No. 1004
Generation of Hydrogen Reactive Species For Processing of Workpieces
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-06-14 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-06-11 | PA.. |
Power of Attorney | 2 | View | |
| 2018-06-11 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2018-06-11 | ADS |
Application Data Sheet | 9 | View | |
| 2018-06-11 | SPEC |
Specification | 13 | View | |
| 2018-06-11 | CLM |
Claims | 3 | View | |
| 2018-06-11 | ABST |
Abstract | 1 | View | |
| 2018-06-11 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2018-06-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-06-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-06-11 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-293-P
- Confirmation No.
- 1004
Child
Claims priority from a provisional application
→
App. 16/420,542
· US 11,164,725
Filed 2019-05-23
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/516,065
Filed 2021-11-01
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/033773
Filed 2019-05-23
· RO PROCESSING COMPLETED-PLACED IN STORAGE
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/683,246
- Filed
- 2018-06-11
External Links