Patent Application
Provisional
Small
App. No. 62/684,359
· Confirmation No. 9744
Adhesion layers for EUV lithography
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-06-15 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-06-13 | TR.PROV |
Provisional Cover Sheet (SB16) | 4 | View | |
| 2018-06-13 | ABST |
Abstract | 1 | View | |
| 2018-06-13 | SPEC |
Specification | 22 | View | |
| 2018-06-13 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-06-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 85565
- Docket No.
- BS0288-PRO
- Confirmation No.
- 9744
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/036791
Filed 2019-06-12
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 18/607,956
· US 12,437,993
Filed 2024-03-18
· Patented Case
Child
Claims priority from a provisional application
→
App. 16/439,377
· US 11,972,948
Filed 2019-06-12
· Patented Case
from
GUERRERO, DOUGLAS J.,
LEE, HAO,
CHACKO, ANDREA M.,
GRANNEMANN, STEPHEN,
KRISHNAMURTHY, VANDANA,
LIANG, YICHEN
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-06-12
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Quick Facts
- App. No.
- 62/684,359
- Filed
- 2018-06-13
External Links