Patent Application
Provisional
App. No. 62/685,564
· Confirmation No. 2727
Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process
Applicant:
Mattson Technology, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2018-07-09 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-06-15 | PA.. |
Power of Attorney | 2 | View | |
| 2018-06-15 | TR.PROV |
Provisional Cover Sheet (SB16) | 3 | View | |
| 2018-06-15 | ADS |
Application Data Sheet | 8 | View | |
| 2018-06-15 | SPEC |
Specification | 14 | View | |
| 2018-06-15 | CLM |
Claims | 3 | View | |
| 2018-06-15 | ABST |
Abstract | 1 | View | |
| 2018-06-15 | DRW |
Drawings-only black and white line drawings | 6 | View | |
| 2018-06-15 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-06-15 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2018-06-15 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Michael X. Yang
Palo Alto, CA
Shawming Ma
Sunnyvale, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-290-P
- Confirmation No.
- 2727
Child
Claims priority from a provisional application
→
App. 16/798,732
· US 11,764,072
Filed 2020-02-24
· Patented Case
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/032811
Filed 2019-05-17
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 16/020,178
· US 10,573,532
Filed 2018-06-27
· Patented Case
No recorded assignments were found for this patent.
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Quick Facts
- App. No.
- 62/685,564
- Filed
- 2018-06-15
External Links