Patent Application
Provisional
App. No. 62/711,206
· Confirmation No. 5093
Remote Capacitively Coupled Plasma Source with Improved Ion Blocker
Applicant:
Applied Materials, Inc.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2018-08-01 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2018-07-27 | ABST |
Abstract | 1 | View | |
| 2018-07-27 | CLM |
Claims | 2 | View | |
| 2018-07-27 | SPEC |
Specification | 3 | View | |
| 2018-07-27 | DRW |
Drawings-only black and white line drawings | 1 | View | |
| 2018-07-27 | ADS |
Application Data Sheet | 8 | View | |
| 2018-07-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2018-07-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Vivek B. Shah
Sunnyvale, CA
Vinayak Vishwanath Hassan
Santa Clara, CA
Bhaskar Kumar
Santa Clara, CA
Ganesh Balasubramanian
Fremont, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 67251
- Docket No.
- 44015496US01
- Confirmation No.
- 5093
Child
Claims priority from a provisional application
→
App. 17/381,162
Filed 2021-07-20
· Abandoned -- Failure to Respond to an Office Action
Child
PCT
Claims priority from a provisional application
→
PCT/US2019/043624
Filed 2019-07-26
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 16/523,241
· US 11,069,514
Filed 2019-07-26
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-09-03
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Quick Facts
- App. No.
- 62/711,206
- Filed
- 2018-07-27
External Links