Patent Application
Provisional
App. No. 62/867,527
· Confirmation No. 1061
METHODS AND APPARATUS FOR HIGH VOLTAGE ELECTROSTATIC CHUCK PROTECTION
Inventors:
YUICHI WADA, YUEH SHENG OW, ANANTHKRISHNA JUPUDI, CLINTON GOH, KAI LIANG LIEW, SARATH BABU
Applicant:
APPLIED MATERIALS, INC.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-07-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-06-27 | PA.. |
Power of Attorney | 2 | View | |
| 2019-06-27 | ADS |
Application Data Sheet | 10 | View | |
| 2019-06-27 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2019-06-27 | SPEC |
Specification | 12 | View | |
| 2019-06-27 | CLM |
Claims | 3 | View | |
| 2019-06-27 | ABST |
Abstract | 1 | View | |
| 2019-06-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-06-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
YUICHI WADA
CHIBA, JAPAN
YUEH SHENG OW
SINGAPORE, SINGAPORE
ANANTHKRISHNA JUPUDI
SINGAPORE, SINGAPORE
CLINTON GOH
SINGAPORE, SINGAPORE
KAI LIANG LIEW
NORTH EAST SINGAPORE, SINGAPORE
SARATH BABU
SINGAPORE, SINGAPORE
Attorneys & Agents of Record
Prosecution
- Customer No.
- 55649
- Docket No.
- 44017037US01
- Confirmation No.
- 1061
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-08-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-07-23
from
BABU, SARATH,
GOH, CLINTON,
JUPUDI, ANANTHKRISHNA,
LIEW, KAI LIANG,
OW, YUEH SHENG,
WADA, YUICHI
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-09-20
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Quick Facts
- App. No.
- 62/867,527
- Filed
- 2019-06-27
External Links