Patent Application
Provisional
App. No. 62/893,177
· Confirmation No. 3487
HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER
Inventors:
Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh, Yuichi Wada, Kang Zhang
Applicant:
APPLIED MATERIALS, INC.
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2020-03-05 | R48.REQ.G |
Acceptance of Request under Rule 48 to correct inventorship or name | 1 | View | |
| 2020-03-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-03-03 | R48.REQ |
Request under Rule 48 correcting inventorship | 2 | View | |
| 2020-03-03 | ADS |
Application Data Sheet | 10 | View | |
| 2020-03-03 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-03-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-10-28 | R48.REQ.G |
Acceptance of Request under Rule 48 to correct inventorship or name | 1 | View | |
| 2019-10-28 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-10-24 | R48.REQ |
Request under Rule 48 correcting inventorship | 2 | View | |
| 2019-10-24 | ADS |
Application Data Sheet | 10 | View | |
| 2019-10-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-10-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2019-09-05 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-08-28 | SCORE |
Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) | 1 | View | |
| 2019-08-28 | PA.. |
Power of Attorney | 2 | View | |
| 2019-08-28 | SPEC |
Specification | 14 | View | |
| 2019-08-28 | CLM |
Claims | 4 | View | |
| 2019-08-28 | ABST |
Abstract | 1 | View | |
| 2019-08-28 | ADS |
Application Data Sheet | 10 | View | |
| 2019-08-28 | DRW.NONBW |
Drawings-other than black and white line drawings | 4 | View | |
| 2019-08-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-08-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2019-08-28 | DRW.SUPP |
Drawings-black and white line and/or other drawings | — | View |
Inventors
Sarath Babu
Singapore, SINGAPORE
Ananthkrishna Jupudi
Singapore, SINGAPORE
Yueh Sheng Ow
Singapore, SINGAPORE
Junqi Wei
Singapore, SINGAPORE
Kelvin Boh
Singapore, SINGAPORE
Yuichi Wada
Chiba, JAPAN
Kang Zhang
Singapore, SINGAPORE
Attorneys & Agents of Record
Prosecution
- Customer No.
- 55649
- Docket No.
- 44017241US01
- Confirmation No.
- 3487
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-08-10
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-04-07
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2019-10-30
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Quick Facts
- App. No.
- 62/893,177
- Filed
- 2019-08-28
External Links