Patent Application
Provisional
App. No. 62/914,373
· Confirmation No. 3851
Pedestal Heater for Spatial Multi-Wafer Processing Tool
Applicant:
Applied Materials, Inc.
Provisional Application Expired
|
⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2019-10-22 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2019-10-11 | SPEC |
Specification | 12 | View | |
| 2019-10-11 | CLM |
Claims | 4 | View | |
| 2019-10-11 | ABST |
Abstract | 1 | View | |
| 2019-10-11 | DRW |
Drawings-only black and white line drawings | 5 | View | |
| 2019-10-11 | ADS |
Application Data Sheet | 7 | View | |
| 2019-10-11 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2019-10-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View |
Inventors
Attorneys & Agents of Record
Prosecution
- Customer No.
- 67251
- Docket No.
- 44017019US01
- Confirmation No.
- 3851
Child
PCT
Claims priority from a provisional application
→
PCT/US2020/054994
Filed 2020-10-09
· RO PROCESSING COMPLETED-PLACED IN STORAGE
Child
Claims priority from a provisional application
→
App. 17/845,230
· US 11,682,576
Filed 2022-06-21
· Patented Case
Child
Claims priority from a provisional application
→
App. 17/066,971
· US 11,430,686
Filed 2020-10-09
· Patented Case
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-10-21
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Quick Facts
- App. No.
- 62/914,373
- Filed
- 2019-10-11
External Links